Study of the Technology of Obtaining Thin Films in the Field of Microelectronics
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Open Access Journals Incorporations
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This article gives information about the field of microelectronics, its historical formation, several complementary directions of microelectronics, integral electronics, vacuum integrated circuits, functional microelectronics and the production of thin films and the study of their properties.
Keywords
Microelectronics, integrated electronics, vacuum integrated circuits, functional microelectronics, thin films, thin surface