Study of the Technology of Obtaining Thin Films in the Field of Microelectronics
dc.creator | Abdumutalibovich, Nishonov Komiljon | |
dc.date | 2021-09-25 | |
dc.date.accessioned | 2023-08-21T07:46:30Z | |
dc.date.available | 2023-08-21T07:46:30Z | |
dc.description | This article gives information about the field of microelectronics, its historical formation, several complementary directions of microelectronics, integral electronics, vacuum integrated circuits, functional microelectronics and the production of thin films and the study of their properties. | en-US |
dc.format | application/pdf | |
dc.identifier | https://openaccessjournals.eu/index.php/ijdpp/article/view/206 | |
dc.identifier.uri | http://dspace.umsida.ac.id/handle/123456789/13933 | |
dc.language | eng | |
dc.publisher | Open Access Journals Incorporations | en-US |
dc.relation | https://openaccessjournals.eu/index.php/ijdpp/article/view/206/199 | |
dc.rights | Copyright (c) 2021 International Journal of Development and Public Policy | en-US |
dc.source | International Journal of Development and Public Policy; Vol. 1 No. 4 (2021): International Journal of Development and Public Policy ; 51-53 | en-US |
dc.source | 2792-3991 | |
dc.subject | Microelectronics | en-US |
dc.subject | integrated electronics | en-US |
dc.subject | vacuum integrated circuits | en-US |
dc.subject | functional microelectronics | en-US |
dc.subject | thin films | en-US |
dc.subject | thin surface | en-US |
dc.title | Study of the Technology of Obtaining Thin Films in the Field of Microelectronics | en-US |
dc.type | info:eu-repo/semantics/article | |
dc.type | info:eu-repo/semantics/publishedVersion | |
dc.type | Peer-reviewed Article | en-US |